On the features of the formation of polar distribution of sputtered atoms in the md model of the (001) Ni face sputtering

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Аннотация

Using a modern complete molecular dynamics model of single crystal sputtering taking into account ion incidence on the surface, the mechanisms of formation of the polar and azimuthal angle distribution of atoms sputtered from the surface of the (001) Ni face by Ar ions with an energy of 200 eV are studied. It is shown that the sputtered atoms, over focused by the azimuthal angle, eject only near the directions corresponding to the directions to the centers of lenses of two atoms in the surface plane neighboring to the ejecting atom. It is found that in the polar angular distribution of sputtered atoms with an energy of 2.5 ± 0.1 eV in the range of the azimuthal angle of 87° ± 1.5°, close to the center of the lens, three maxima formed by atoms with significantly different mechanisms of emission are observed. It is concluded that the formation of these maxima occurs only due to the surface mechanism of single crystal sputtering.

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Авторлар туралы

A. Musin

Moscow State University of Technology “STANKIN”, Institute of Digital Intelligent Systems; Vyatka State University, Institute of Mathematics and Information Systems

Хат алмасуға жауапты Автор.
Email: samoilov@polly.phys.msu.ru
Ресей, Moscow; Kirov

V. Samoilov

Lomonosov Moscow State University, Faculty of Physics

Email: samoilov@polly.phys.msu.ru
Ресей, Moscow

Әдебиет тізімі

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Әрекет
1. JATS XML
Жүктеу
2. Fig. 1. Characteristic trajectories of emission of focused (a) and overfocused (b) atoms during scattering on a lens of two surface atoms closest to the emitted atom (top view).

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Метадеректер
3. Fig. 2. Angular distribution of all sputtered atoms obtained in the MD model of sputtering of the (001) Ni face by Ar ions with an energy of 200 eV at a target temperature of 0 K. The number of incident ions is ∼106.

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Метадеректер
4. Fig. 3. Angular distribution of overfocused sputtered atoms obtained in the MD model of sputtering of the (001) Ni face by Ar ions with an energy of 200 eV at a target temperature of 0 K. The number of incident ions is ∼106.

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Метадеректер
5. Fig. 4. Distribution by 1 — cosθ of atoms sputtered from the (001) face of Ni under bombardment with Ar ions with an energy of 200 eV, observed in the range of the azimuthal angle φ = 87° ± 1.5° with an energy E = 2.5 ± 0.1 eV. Three separate maxima are formed by atoms that are proper in the azimuthal angle (maximum I) and mainly overfocused atoms (maxima II, III).

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